FinFET device and method of forming and monitoring quality of the same

ABSTRACT

A FinFET structure with a gate structure having two notch features therein and a method of forming the same is disclosed. The FinFET notch features ensure that sufficient spacing is provided between the gate structure and source/drain regions of the FinFET to avoid inadvertent shorting of the gate structure to the source/drain regions. Gate structures of different sizes (e.g., different gate widths) and of different pattern densities can be provided on a same substrate and avoid inadvertent of shorting the gate to the source/drain regions through application of the notched features.

PRIORITY CLAIM

This application is a divisional of U.S. patent application Ser. No.15/002,287, filed on Jan. 20, 2016, and entitled “FinFET Device andMethod of Forming and Monitoring Quality of the Same” which applicationclaims priority to U.S. Provisional Patent Application No. 62/244,087filed on Oct. 20, 2015 and U.S. Provisional Patent Application No.62/261,746, filed on Dec. 1, 2015, all of which applications are hereinincorporated by reference.

BACKGROUND

Semiconductor devices are widely used in a large number of electronicdevices, such as computers, cell phones, and others. Semiconductordevices comprise integrated circuits that are formed on semiconductorwafers by depositing many types of thin films of material over thesemiconductor wafers, and patterning the thin films of material to formthe integrated circuits.

To address the increase of manufacturing complexity and the accompaniedproblems in manufacturing process, advances in IC processing andmanufacturing are necessary. For example, a three dimensionaltransistor, such as a fin-like field-effect transistor (Fin-FET), hasbeen introduced to replace a planar transistor. In the manufacturingprocess of the Fin-FET devices, further improvements are constantlynecessary to satisfy the performance requirement in the scaling downprocess.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 illustrates an exemplary flow chart for manufacturing a FinFETdevice in accordance with the embodiments.

FIG. 2 illustrates a three dimensional view of a FinFET device inaccordance with the embodiment.

FIGS. 3A, 4A, 5A, 6A, and 7A illustrate various cross sectional views ofa FinFET device along line A-A in FIG. 2 at different stages ofmanufacturing processes in accordance with the embodiments.

FIGS. 3B, 4B, 5B, 6B, and 7B illustrate various cross sectional views ofa FinFET device along line B-B in FIG. 2 at different stages ofmanufacturing processes in accordance with the embodiments.

FIGS. 6C and 7C illustrate various cross sectional views of a FinFETdevice along line C-C in FIG. 2 at different stages of manufacturingprocesses in accordance with the embodiments.

FIG. 8 illustrate a cross sectional views of a FinFET device inaccordance with the embodiments.

FIG. 9 illustrates an exemplary flow chart of monitoring a quality of aFinFET device in accordance with the embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

The singular forms “a,” “an” and “the” include plural referents unlessthe context clearly dictates otherwise. Therefore, reference to, forexample, a conductive plug includes aspects having two or more suchplug, unless the context clearly indicates otherwise. Further, spatiallyrelative terms, such as “beneath,” “below,” “lower,” “above,” “upper”and the like, may be used herein for ease of description to describe oneelement or feature's relationship to another element(s) or feature(s) asillustrated in the figures.

In the manufacture of a semiconductor device, it is very important foran integrated circuit to operate in a stable condition, thus anypossibility of causing short circuit should be avoided. In a finfield-effect transistor (FinFET), one of such short circuit may occurbetween a source/drain area in a fin structure and a gate structurewrapping the fin. In a normal situation, during forming the gatestructure wrapping the fin structure, a removing process such as etchingis controlled to remove a gate material layer to form a desired shape ofthe gate structure. However, in a traditional etching way to form thegate structure, the gate structure in a center area of a substrate andthe gate structure in a periphery area of the substrate are underdifferent etching rate. Such different etching rate may cause differentprofiles of gate structures in the periphery area with respect to thegate structures in the center area. For example, the gate structure inthe periphery area may be under etched which may result in a footingfeature (or a gate protrusion) extending from a lower portion of thegate structure. The footing feature may cause a short circuit betweenthe gate structure and a source/drain area formed subsequently.

To solve the problem of short circuit between the gate structure and thesource/drain area that is caused by the footing feature of the gatestructure, a method is provided to make gate structures in both thecenter area and the periphery area have two notch features therein. Inthe disclosure, a different flow rate of etching gas at the center areacompared to the periphery area during a dry plasma etching process isapplied to improve the etching process (i.e. increasing etching rate) atthe periphery area. In addition, by properly adjusting other etchingparameters, such as etching pressure, RF bias voltage, and over etchingtime, gate structures in the center area and in the periphery area bothhave the two notch features with a same profile. In particular, thedimension (or a set of distances) of the notch features may becontrolled in a predetermined criterion. Thus the FinFET device willhave a good electrical property which can be measured from a waferacceptance test (WAT) procedure.

Now referring to FIG. 1, which is an exemplary flow chart formanufacturing a FinFET device according to one embodiment of the presentdisclosure. The flow chart illustrates only a relevant part of theentire manufacturing process. It is understood that additionaloperations may be provided before, during, and after the operationsshown by FIG. 1, and some of the operations described below can bereplaced or eliminated for additional embodiments of the method. Theorder of the operations/processes may be interchangeable.

As shown in FIG. 1, an embodiment method 1000 of forming two notchfeatures in a gate structure of a FinFET is provided. In step 1002, afin supported by a substrate is formed. In step 1004, an isolationstructure is formed between the fins. In step 1006, a gate oxide layerand a gate material layer are deposited over the fin. In step 1008, afirst hard mask layer and a second hard mask layer are deposited on thegate material layer. In step 1010, the second hard mask layer, thesecond hard mask layer, and the gate material layer are etched to form agate structure with two notch features therein. In step 1012, an epitaxyis formed in the fin.

Referring to FIG. 2, a three dimensional view of a FinFET device with agate structure having two notch features therein is provided first forunderstanding the present disclosure more easily and clearly. In thefollowing discussions related to a the method 1000 of forming the FinFETdevice, a plurality of cross sectional views of the FinFET device alongline A-A, line B-B, and line C-C are shown in FIG. 3A to FIG. 7A, FIG.3B to FIG. 7B, and FIG. 6C to FIG. 7C respectively for bestunderstanding the present disclosure.

Referring to FIGS. 1, 2, 3A, and 3B, the method 1000 starts from step1002 by forming fins 122, 132, 134, 136, and 138 supported by asubstrate 110. The substrate 110 comprises two areas: a center area 120with the fin 122 thereon; and a peripheral area 130 with the fins 132,134, 136, and 138 thereon. It should be noticed that the center area 120and the peripheral area 130 may located at either a dense area or an isoarea respectively, wherein the dense area is defined to be an area witha high density of fins thereon, while the iso area is defined to be anarea with a low density of fins thereon. In other embodiments, thesubstrate 110 comprises a dense area 130 and an iso area 120.Furthermore, the dense area 130 and the iso area 120 may both located ata center area of the substrate 110 or a peripheral area of the substrate110.

The substrate 110 may be a bulk silicon substrate. Alternatively, thesubstrate 100 may comprise an elementary semiconductor, such as silicon(Si) or germanium (Ge) in a crystalline structure; a compoundsemiconductor, such as silicon germanium (SiGe), silicon carbide (SiC),gallium arsenic (GaAs), gallium phosphide (GaP), indium phosphide (InP),indium arsenide (InAs), and/or indium antimonide (InSb); or acombination thereof. Further, the substrates 110 may also include asilicon-on-insulator (SOI) substrate. Generally, an SOI substratecomprises a layer of a semiconductor material such as silicon (Si),germanium (Ge), silicon germanium (SiGe), silicon germanium on insulator(SGOI), or a combination thereof. The SOI substrate 100 is fabricatedusing separation by implantation of oxygen (SIMOX), wafer bonding,and/or other suitable methods. Other substrates that may be used includemulti-layered substrates, gradient substrates, or hybrid orientationsubstrates. In the embodiment, the substrate 110 is a bulk siliconsubstrate. That is to say, fins 122, 132, 134, 136, and 138 arephysically connected to the substrate 110.

Still referring to FIGS. 1, 2, 3A, and 3B, the method 1000 proceeds tostep 1004 by forming an isolation structure 140 between fins 122, 132,134, and 138. The isolation structure 140 functions as an insulatinglayer or an isolation layer for separating two active areas comprisingsuch as epitaxy 200 in the fins 122, 132, 134, and 138. The isolationstructure 140 may comprise any suitable insulating materials such as,for example but not limited to, silicon oxide (SiO₂), silicon nitride(SiN), silicon oxynitride (SiON), fluoride-doped silicate glass, a low-kdielectric material, and a combination thereof. As used herein, the term“low-k dielectric” refers to the material having a dielectric constant,k, smaller than about 3.9, which is the k value of SiO₂. The isolationstructure 140 may also comprise flowable material such as, for example,silicate, siloxane, methyl SilsesQuioxane (MSQ), hydrogen SisesQuioxane(HSQ), MSQ/HSQ, perhydrosilazane (TCPS), perhy-dro-polysilazane (PSZ), atetraethyl orthosilicate (TEOS), or a silyl-amine, such as trisilylamine(TSA).

Referring to FIGS. 1, 2, 4A, and 4B, the method 1000 proceeds to step1006 by depositing a gate oxide layer 152 on the fins and a gatematerial layer 154 on the gate oxide layer 152. The gate oxide layer 152may comprise LaO, AlO, ZrO, TiO, SiO₂, Ta₂O₅, Y₂O₃, SrTiO₃ (STO), BaTiO₃(BTO), BaZrO, HfZrO, HfLaO, HfSiO, LaSiO, AlSiO, HfTaO, HfTiO,(Ba,Sr)TiO₃ (BST), Al₂O₃, Si₃N₄, oxynitrides (SiON), or other suitablematerials. While the gate material layer 154 may comprise a conductivematerial, such as a metal (e.g., tantalum, titanium, molybdenum,tungsten, platinum, aluminum, hafnium, ruthenium), a metal silicide(e.g., titanium silicide, cobalt silicide, nickel silicide, tantalumsilicide), a metal nitride (e.g., titanium nitride, tantalum nitride),doped poly-crystalline silicon, other conductive materials, or acombination thereof. In some embodiments, the gate oxide layer 152 andthe gate material layer 154 are formed by a deposition process, such aschemical vapor deposition (CVD).

Referring to FIGS. 1, 2, 5A, and 5B, the method 1000 proceeds to step1008 by depositing a first hard mask layer 162 on the gate materiallayer 154 and a second hard mask layer 164 on the first hard mask layer162. The first hard mask layer 164 and the second hard mask layer maycomprises a same material or a different material selected from SiC,SiCN, SiN, TaO, TiO₂, SiO₂, Si₃N₄, SiON, any suitable material, or acombination thereof. In some embodiments, the first hard mask layer 162and the second hard mask layer 164 are formed by a deposition process,such as chemical vapor deposition (CVD). In other embodiments, the firsthard mask layer 162 may comprise a multiple structure. In yet otherembodiments, only a hard mask layer such as the first mask layer 162 isformed on the gate material layer 154.

Referring to FIGS. 1, 2, and 6A-6C, the method 1000 proceeds to step1010 by etching the second hard mask layer 164, the second hard masklayer 162, and the gate material layer 154 to form gate structures 170and 171 with two notch features therein. Before performing the etchingprocess of step 1006, the first hard mask layer 162 and the second hardmask layer 164 are patterned through a suitable photolithographicprocess to form a pattern thereon. Followed by an etching process toform the gate structure 170 and 171 as well as a first hard mask 180 anda second hard mask 190 on the gate structure 170 and 171.

The etching process may comprise dry etching, wet etching, plasmaetching, reactive-ion etching, a combination thereof, or other suitableprocesses. The etching gas used in the etching process may comprise HBr,CF₄, CHF₃, CH₄, CH₂F₂, N₂H₂, BCl₃, Cl₂, N₂, H₂, O₂, He, Ar, and acombination thereof. To make the gate structure 170 in the center area120 and the gate structure 171 in the peripheral area 130 both have twonotch features with a same profile, some etching parameters needs to betuned. The etching parameters of a dry plasma etching process mayinclude etching temperature, etching pressure, source power, RF biasvoltage, RF bias power, gas flow, over etching time, and other suitableparameters. In the embodiment, the gas flow is not uniform at a centerarea 120 and a peripheral area 130. In the embodiment, the ratio of thegas flow at the center area to the gas flow at the peripheral area is ina range between about 0.2 to about 1. In some embodiments, the ratio isless than 0.2. That is to say, the gas flow at the peripheral area 130is larger than that at the center area 120 so that an etching rate ofthe gate material layer 154 at the peripheral area 130 is as similar asthat in the center area 120. It should be noticed that a higher etchingrate of the gate material layer 154 at the peripheral area 130 improvesan under etching situation in the peripheral area 130 in the traditionaletching way (i.e. same gas flow at the peripheral area 130 and at thecenter area 120) and avoid a footing feature which may cause a shortcircuit issue from occurring.

Furthermore, other parameters of the dry plasma etching process mayimprove the etching process of the gate material layer 154. In theembodiment, the etching pressure is in a range between about 13 mtorrand about 20 mtorr. In some embodiments, the etching pressure is higherthan about 20 mtorr or lower than about 13 mtorr. In the embodiment, theRF bias voltage is in a range between about 160 V and about 180 V. Insome embodiments, the RF bias voltage is higher than about 180 V or lessthan about 160 V. In the embodiment, the over etching time is in a rangebetween about 30 seconds to about 32 seconds. In some embodiments, theover etching time is longer than about 32 seconds or shorter than 30seconds. By applying these etching parameters, an under etchingsituation occurred in the peripheral area 130 in a traditional way maybe improved to avoid the footing feature.

In addition, by properly choosing parameters of an etching process, thegate structures 170 and 171 at either a dense area or an iso area of acenter area or a peripheral area both have two notch features in a firstportion and a second portion of the gate structures 170 and 171respectively.

Referring to FIG. 6A, the gate structure 170 in the center area 120 hasa first portion 172 over the fin 122 and a second portion 174 overlappedwith sidewalls of the fin 122. That is to say, the gate structure 170 isseparated into two parts connected to each other. And the bottom surfaceof the first portion 172 is overlapped with the top surface of thesecond portion 174. The notch feature in the first portion 172 comprisesa set of distances comprising a first width (W1) at a top surface of thefirst portion 172 and a first height (H1) from a top surface of thefirst portion 172 to the fin 122. On the other hand, the notch featurein the second portion 174 comprises a set of distances comprising asecond width (W2) at a top surface of the second portion 174, a thirdwidth (W3) at a middle position of the second portion 174, a fourthwidth (W4) at a bottom surface of the second portion 174, a secondheight (H2) from a bottom surface of the second portion 174 to the fin122, and a third height (H3) form a middle position of the secondportion 174 to the fin 122. It should be noticed that each of the set ofdistances mentioned above is referenced to the second width (W2), and arelative position between any two of the set of the distances can becalculated and known by the aforementioned definitions of the set ofdistances.

Referring to FIG. 6C, the gate structure 171 in the peripheral area 130has a first portion 173 over the fin 132 and a second portion 175overlapped with sidewalls of the fin 132. That is to say, the gatestructure 171 is separated into two parts connected to each other. Andthe bottom surface of the first portion 173 is overlapped with the topsurface of the second portion 175. The notch feature in the firstportion 173 comprises a set of distances comprising first width (W11) ata top surface of the first portion 173 and a first height (H11) from atop surface of the first portion 173 to the fin 132. On the other hand,the notch feature in the second portion 175 comprises a set of distancescomprising a second width (W12) at a top surface of the second portion175, a third width (W13) at a middle position of the second portion 175,a fourth width (W14) at a bottom surface of the second portion 175, asecond height (H12) from a bottom surface of the second portion 175 tothe fin 132, and a third height (H13) form a middle position of thesecond portion 175 to the fin 132.

In the embodiment, the gate structure 170 and the gate structure 171have the notch features with the same profile (or the same set ofdistances) in the first portion 172 and 173 and in the second portion174 and 175 respectively. Furthermore, the set of distances of the notchfeatures of the gate structures 170 and 171 mentioned above may be usedin a comparison with a predetermined criterion for obtaining a qualityrelated to electric properties of the FinFET device, which will bediscussed later.

Referring to FIGS. 1, 2, and 7A-7C, the method 1000 proceeds to step1012 by forming epitaxy 200 in the fins 122 and 132 respectively. Theepitaxy 200 may be formed by depositing a crystalline in a recess (notshown) of the fins 122 and 132. As shown in FIG. 7A, there is a distanceD1 between the epitaxy 200 and the second portion 174 of the gatestructure 170, and a distance D2 between the epitaxy 200 and the firstportion 172 of the gate structure 170. On the other hand, as shown inFIG. 7C, there is a distance D11 between the epitaxy 200 and the secondportion 175 of the gate structure 171, and a distance D12 between theepitaxy 200 and the first portion 173 of the gate structure 171. Thedistance D1, D2, D11 and D12 should be precisely controlled to avoidshort circuit from occurring. In the embodiment, the notch feature inthe second portion 174 and 175 of the gate structure 170 and 171 mayprovide a larger distance D1 and D11 so that a process window may beenlarged and a stability of a semiconductor device may be increased.Furthermore, the notch feature in the first portion 172 and 173 of thegate structure 170 and 171 may also provide a larger distance D2 andD12, thus a short circuit issue caused by a footing feature may beavoided as well.

In other embodiments as shown in FIG. 8, gate structures may comprisedifferent width, thus different channel lengths may be formed under gatestructures for design requirements. As shown in FIG. 8, gate structurescomprising a short channel gate 770, a middle channel gate 870, and along channel gate 970 are formed on a fin 822 and a gate oxide layer852. In addition, each gate structure 770, 870, and 970 comprises afirst hard mask 780, 880, and 980 and a second hard mask 790, 890, and990 respectively. By using the etching method with particular etchingparameters mentioned above, the short channel gate 770, the middlechannel gate 870, and the long channel gate 970 can have two notchfeatures with a same profile therein. To be more precisely, a differencebetween each one of the set of distance of the notch features mentionedabove in FIG. 6 is the same among the short channel gate 770, the middlechannel gate 870, and the long channel gate 970. For example, adifference between a first width (W771) and a second width (W772) of theshort channel gate 770 is equal to a difference between a first width(W871) and a second width (W872) of the middle channel gate 870. And adifference between a second width (W772) and a third width (W773) of theshort channel gate 770 is equal to a difference between a second width(W872) and a third width (W873) of the middle channel gate 870. Also, adifference between a second width (W872) and a third width (W873) of themiddle channel gate 870 is equal to a difference between a second width(W972) and a third width (W973) of the long channel gate 970. And adifference between a first width (W871) and a second width (W872) of themiddle channel gate 870 is equal to a difference between a first width(W971) and a second width (W972) of the long channel gate 970. Thus, theetching method with particular parameters mentioned above can be used toform the same difference between any two distances of the set ofdistances when comparing gate structures with different gate width.

Now referring to FIG. 9, which is an exemplary flow chart of monitoringa quality of a FinFET device according to one embodiment of the presentdisclosure. The flow chart illustrates only a relevant part of theentire manufacturing process. It is understood that additionaloperations may be provided before, during, and after the operationsshown by FIG. 9, and some of the operations described below can bereplaced or eliminated for additional embodiments of the method. Theorder of the operations/processes may be interchangeable.

Referring to FIG. 9, the method 2000 of monitoring a quality of a FinFETdevice starts from step 2002 by providing a FinFET device comprising agate structure having a notch feature therein. The FinFET device may beprovided by the manufacturing method 1000 mentioned above in FIG. 1.Alternatively, the FinFET device may be received from other embodiments.The method 2000 discussed herein only refers to a monitoring methodregardless of a source of the FinFET device.

Referring to FIG. 9, the method 2000 proceeds to step 2004 by measuringa profile of the notch feature in the gate structure. The method ofmeasuring the profile of the notch feature may be an inline inspection.The measuring method may use a TEM method comprising slicing thesubstrate including the notch feature and then performing an electronmicroscope scanning to measure the profile of the notch feature. Byobserving a cross sectional TEM image of the notch feature, eachdistance of the set of distances mentioned above in FIG. 6 can beobtained directly and precisely. Alternatively, the measuring method mayuse an optical critical-dimension (OCD) inspection. The OCD measuringmethod comprises irradiating a notch feature with an incidentelectromagnetic wave, receiving an emitted electromagnetic wave from thenotch feature after an interaction between the incident electromagneticwave and the notch feature, and obtaining the profile of the notchfeature by calculating a polarization change between the incidentelectromagnetic wave and the emitted electromagnetic wave. The OCDinspection can be used to provide a non-destructive measurement forobtaining the distance of the set of distances mentioned above.

Referring to FIG. 9, the method 2000 proceeds to step 2006 by comparingthe profile of the notch feature with a predetermined criterion forobtaining a quality of the FinFET device. After the profile and eachdistance of a set of distances mentioned above in FIG. 6A are obtainedby the method discussed in the step 2004, the distance of a set ofdistances of the notch feature is compared with a predeterminedcriterion. It should be noticed that each distance of a set of distanceof the notch feature in FIG. 6A is used for easily and clearlyunderstanding the predetermined criterion. The predetermined criterioncomprise following conditions: the first width (W1) is larger than thesecond width (W2); the second width (W2) is larger than the third width(W3), wherein the difference between the second width (W2) and the thirdwidth (W3) is in a range between about 0.001 nm and about 15 nm; and thefirst height (H1) is larger than the second height (H2), wherein thesecond height (H2) is in a range between about 0.001 nm and about 50 nm.Since the third width (H3) is half of the second height (H2), the thirdwidth (H3) is in a range between about 0.001 nm and about 25 nm. Itshould be noticed that the fourth width (W4) is not limited in thepredetermined criterion, thus a width of the fourth width (W4) may belarger than the third width (W3) or smaller than the third width (W3).In the embodiment, the second portion 174 comprises smooth sidewallswith a same slope so that the fourth width (W4) is smaller than thethird width (W3). It should be noticed that the criterion is applied tothe notch feature of all gate structures in a FinFET device. It shouldbe noticed that a half upper part of the second portion 174 having aspecific profile, comprising a second width (W2), a third width (W3),and a third height (H3) as shown in FIG. 6A. Further, the second portion174 has a slope on a sidewall thereof. The slope is defined as ratio ofthe third height (H3) to the difference between the second width (W2)and the third width (W3), and a positive slope represents a slope of thesecond portion 174 having a second width (W2) larger than the thirdwidth (W3), while a negative slope represents a slope of the secondportion 174 having a second width (W2) smaller than the third width(W3). In the embodiment, the slope is in a range between 0.000067 and25000. In some embodiments, the slope is in a range between 0.067 and25. By controlling the slope of the second portion 174 of the gatestructure 170, the gate structure 170 will operate normally and pass aWAT (wafer acceptance test).

Furthermore, once the distance of a set of distances of the notchfeature meets the predetermined criterion mentioned above, items of asubsequent wafer acceptance test (WAT) also meet a predeterminedstandard value, thus proving that electrical properties and stability ofa FinFET device is good or acceptable. The items of a WAT related to agate structure may comprise Rc, Cgd, Cgg, Rg, drain-induced barrierlowering (DIBL), and other test items.

As aforementioned, a method of forming gate structures having two notchfeatures with a same profile is very important for improving electricalperformance and stability of a semiconductor device. It is known thatduring a traditional way to etch a gate material layer to form gatestructures may result in an uncontrollable dimension in gate structureslocating in different zones (i.e. center/peripheral areas or dense/isoareas) of a substrate. The uncontrollable dimension of gate structuremay lead to defects, such as short circuit caused by a footing featureof a gate structure, in some under-etched gate structures. Hence, amethod is needed for improving dimension controlling of gate structuresso as to prevent short circuit from occurring.

A method disclosed according to the embodiments to dissolve the problemdescribed above of the dimension controlling of gate structures duringan etching process of a gate material layer is providing a different gasflow at a center area and at a peripheral area of a substrate and tuningetching parameters such as etching pressure, bias power, and overetching time. By properly tuning a gas flow and other etchingparameters, all formed gate structures have two notch features with asame profile. Furthermore, gate structures with different gate widthalso have two notch features with a same difference between eachdistance of a set of distances of the notch feature. In addition, theset of distances of the notch feature are correlated to wafer acceptancetest (WAT) items. In other words, the set of distance of the notchfeatures may provide information for determining a quality of a FinFETdevice. That is to say, once the distances of the set of distances ofthe notch feature meet a predetermined criterion, the related outcomeWAT result will be good and acceptable. In summary, the method in thedisclosure can form two notch features with a same profile in all gatestructures. And the profile (or the set of distances) of the notchfeatures all meet a predetermined criterion to have a good quality of aFinFET device.

In accordance with some embodiments of the present disclosure, a methodof forming a FinFET structure, the method comprises: forming a pluralityof fins supported by a substrate; depositing a gate layer on the fins;and etching the gate layer by plasma etching with an etching gas to forma gate having two notch features in a first portion over the fin and ina second portion overlapped with sidewalls of the fin. The substrate hasa center area and a peripheral area. The etching gas during the plasmaetching is supplied at a ratio of a flow rate at the center area to aflow rate at the periphery area in a range from 0.2 to 1.

In accordance with some embodiments of the present disclosure, a methodof monitoring a quality of a FinFET device, the method comprising:providing the FinFET device comprising a fin supported by a substrateand a gate structure having a notch feature in a portion overlapped withsidewalls of the fin; measuring a profile of the notch feature; andobtaining the quality of the FinFET device by comparing the profile ofthe notch feature with a predetermined criterion.

In accordance with some embodiments of the present disclosure, a FinFETdevice comprises a substrate, a fin supported by the substrate, and agate structure having two notch features. The two notch features are ina first portion over the fin and a second portion overlapped withsidewalls of the fin. A profile of the notch features comprises: a firstwidth at a top surface of the first portion; a second width at a topsurface of the second portion; a third width at a middle position of thesecond portion; a fourth width at a bottom surface of the secondportion; a first height from the first width to the second width; asecond height from the second width to the third width; and a thirdheight from the third width to the fourth width. Wherein the third widthis smaller than the second width and a difference between the thirdwidth and the second width is in a range between 0.001 nm and 25 nm; andthe second height is in a range between 0.001 nm and 25 nm.

One general aspect of embodiments disclosed herein includes a FinFETdevice, the FinFET device including: a fin supported by a substrate; anda gate structure having two notch features individually in a firstportion over the fin and a second portion overlapped with sidewalls ofthe fin, where a profile of the two notch features includes: a firstwidth at a top surface of the first portion; a second width at a topsurface of the second portion; a third width at a middle position of thesecond portion; a fourth width at a bottom surface of the secondportion; a first height from the first width to the second width; asecond height from the second width to the third width; and a thirdheight from the third width to the fourth width, where the third widthis smaller than the second width and a difference between the thirdwidth and the second width is in a range between 0.001 nm and 25 nm; andthe second height is in a range between 0.001 nm and 25 nm.

One general aspect of embodiments disclosed herein includes a FinFETdevice, the FinFET device including: a fin supported by a substrate; anda first gate structure having two notch features individually in a firstportion over the fin and a second portion overlapped with sidewalls ofthe fin, where a profile of the two notch features includes: a firstwidth at a top surface of the first portion; a second width at a topsurface of the second portion; a third width at a middle position of thesecond portion; a fourth width at a bottom surface of the secondportion; a first height from the first width to the second width; asecond height from the second width to the third width; and a thirdheight from the third width to the fourth width, where the third widthis smaller than the second width and a difference between the thirdwidth and the second width is in a range between 0.001 nm and 15 nm; andthe second height is in a range between 0.001 nm and 50 nm, and furtherwhere the third height is about half the second height.

Yet another general aspect of embodiments disclosed herein includes aFinFET device including: at least one fin extending in a firstlongitudinal direction; a gate structure extending in a secondlongitudinal direction perpendicular to the first longitudinaldirection, the gate structure having a notched profile when viewed incross-section along the first longitudinal direction, the notchedprofile including: a first portion extending above the at least one fintop surface, the first portion having a sidewall that slopes from afirst width W1 at a top height H1 to a second width W2 at a bottomheight; and a second portion extending along a sidewall of the at leastone fin, the second portion having a sidewall that slopes from thesecond width W2 at the top of the second portion to a third width W3 ata point a first distance H3 below the top of the second portion to afourth width w4 at a point a second distance H2 below the top of thesecond portion; and where the following conditions are met by theprofile of the gate structure: W1>W2>W3, H1>H2, H3=H2/2, and0.067<H3/(W2−W3)<25.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A FinFET device, the FinFET device comprising: afin supported by a substrate; and a gate structure having two notchfeatures individually in a first portion over the fin and a secondportion overlapped with and extending along sidewalls of the fin,wherein a profile of the two notch features comprises: a first width ata top surface of the first portion; a second width at a top surface ofthe second portion; a third width at a middle position of the secondportion; a fourth width at a bottom surface of the second portion; afirst height from the first width to the second width; a second heightfrom the second width to the fourth width; and a third height from thethird width to the fourth width, wherein the third width is smaller thanthe second width and a difference between the third width and the secondwidth is in a range between 0.001 nm and 25 nm; and the second height isin a range between 0.001 nm and 25 nm; and a second gate structurehaving two notch features individually in a third portion over the finand a fourth portion overlapped with the sidewalls of the fin, the twonotch features of the second gate structure being wherein the secondgate structure defines a second channel length greater than the firstchannel length of the gate structure; wherein the gate structure and thesecond gate structure have the same profile when viewed from a directionperpendicular to the first channel length, and further wherein adifference between the first width and the second width of the gatestructure is equal to a difference between the first width and thesecond width of the second gate structure.
 2. The FinFET device of claim1, wherein the first height is larger than combined height of the secondheight and the third height.
 3. The FinFET device of claim 1, whereinthe third height is in a range between 0.001 nm and 25 nm.
 4. The FinFETdevice of claim 1, wherein the first width is larger than the secondwidth.
 5. The FinFET device of claim 1, wherein the gate structurecomprises a gate oxide layer and a gate electrode.
 6. The FinFET deviceof claim 5, wherein the gate oxide layer comprises a material selectedfrom a group consisted of hafnium oxide, titanium nitride, silicondioxide, silicon nitride, silicon oxynitride, and a combination thereof.7. The FinFET device of claim 5, wherein the gate electrode comprises amaterial selected from a group consisted of polycrystalline-silicon(poly-Si), poly-crystalline silicon germanium (poly-SiGe), siliconnitride, and a combination thereof.
 8. The FinFET device of claim 1,further comprising a hard mask on the gate structure.
 9. The FinFETdevice of claim 8, wherein the hard mask comprises a material selectedfrom a group consisted of SiC, SiCN, SiN, TaO, TiO₂, SiO₂, Si₃N₄, SiON,and a combination thereof.
 10. The FinFET device of claim 8, wherein thehard mask comprises a two layer structure.
 11. The FinFET device ofclaim 1, further comprising: the gate structure having a longitudinalaxis extending in a first direction; a second gate structure having alongitudinal axis extending in the first direction and being alignedwith the first fin in the first direction, the second gate structureextending over the plurality of second fins and having portionsoverlapped with and extending along respective sidewalls of theplurality of second fins, wherein a profile of the second gate structureviewed from the first direction is the same as the profile of the gatestructure viewed from the first direction; and wherein an end of thegate structure viewed from a second direction perpendicular to the firstdirection is vertical, and a second end of the second gate structureviewed from the second direction is vertical.
 12. The FinFET device ofclaim 1, further comprising: a third gate structure having two notchfeatures individually in a fifth portion over the fin and a sixthportion overlapped with the sidewalls of the fin, wherein the third gatestructure defines a third channel length greater than the second channellength; and wherein the gate structure and the third gate structure aregeometrically similar, and further wherein a difference between thefirst width and the second width of the gate structure is equal to adifference between the first width and the second width of the thirdgate structure.
 13. A FinFET device, the FinFET device comprising: a finsupported by a substrate; and a first gate structure having two notchfeatures individually in a first portion over the fin and a secondportion extending along and overlapped with sidewalls of the fin,wherein a profile of the two notch features comprises: a first width ata top surface of the first portion; a second width at a top surface ofthe second portion; a third width at a middle position of the secondportion; a fourth width at a bottom surface of the second portion; afirst height from the first width to the second width; a second heightfrom the second width to the fourth width; and a third height from thethird width to the fourth width, wherein the third width is smaller thanthe second width and a difference between the third width and the secondwidth is in a range between 0.001 nm and 15 nm; and the second height isin a range between 0.001 nm and 50 nm, and further wherein the thirdheight is about half the second height; a second gate structure havingtwo notch features individually in a third portion over the fin and afourth portion overlapped with the sidewalls of the fin, the two notchfeatures of the second gate structure being wherein the second gatestructure defines a second channel length greater than the first channellength of the gate structure; a third gate structure having two notchfeatures individually in a fifth portion over the fin and a sixthportion overlapped with the sidewalls of the fin, wherein the third gatestructure defines a third channel length greater than the second channellength; and wherein the gate structure, the second gate structure andthe third gate structure are geometrically similar, and further whereina difference between the first width and the second width of the gatestructure is equal to a difference between the first width and thesecond width of the second gate structure, and difference between thefirst width and the second width of the second gate structure is equalto a difference between the first width and the second width of thethird gate structure.
 14. The FinFET device of claim 11, wherein thefirst gate structure extends along a first longitudinal axis and furtherwherein the gate structure is divided into at least two sections, thefirst section overlapping a first quantity of fins and the secondsection overlapping a second quantity of fins, the second quantity beinggreater than the first quantity.
 15. The FinFET device of claim 11,wherein the first gate structure has a slope, the slope being a ratio ofthe third height to the difference between the second width and thethird width, and wherein the slope is in a range of between 0.067 and25.
 16. The FinFET device of claim 11, wherein the first height islarger than combined height of the second height and the third height.17. The FinFET device of claim 11, wherein the first width is largerthan the second width.
 18. The FinFET device of claim 11, furthercomprising: an epitaxial source/drain region in the fin, the epitaxialsource/drain having a topmost portion that is separated from the gatestructure by a first distance and having a middle portion that isseparated from the gate structure by a second distance that is less thanthe first distance; and wherein the gate structure sidewall has a slopethat causes the first distance and the second distance to be greaterthan the first distance and the second distance would otherwise be inthe absence of the slope.
 19. A FinFET device comprising: a plurality offins extending in a first longitudinal direction; a gate structureextending in a second longitudinal direction perpendicular to the firstlongitudinal direction, the gate structure having a notched profile whenviewed in cross-section along the first longitudinal direction, thenotched profile including: a first portion extending above at least onefin top surface, the first portion having a sidewall that slopes from afirst width W1 at a top height at a distance H1 above the secondportion, to a second width W2 at a bottom height; and a second portionextending along a sidewall of the at least one fin, the second portionhaving a sidewall that slopes from the second width W2 at the top of thesecond portion to a third width W3 at a point a first distance H3 belowthe top of the second portion to a fourth width W4 at a point a seconddistance H2 below the top of the second portion, and wherein the topheight of the first portion is a distance H1 above the top of the secondportion; and wherein the following conditions are met by the profile ofthe gate structure:W1>W2>W3,H1>H2,H3=H2/2, and0.067<H3/(W2−W3)<25; and a second gate structure extending parallel tothe gate structure, the second gate structure defining a second channellength greater than the first channel length of the gate structure, andwherein the above conditions are met by the profile of the second gatestructure.
 20. The FinFET device of claim 19, wherein H2 is in a rangebetween about 0.001 nm and about 50 nm.
 21. The FinFET device of claim19, wherein W3>W4.